Q (J. Va'vra):
Did you try in your polymerization vessels some of our gases such as
CF4+CH4,
CF4+iC4H10, Ar+CH4, etc. ? Or, can you try them in future?
A (H. Y.):
Yes. Some details will be presented on Friday (ed.: i.e. during the final discussion)
and will be incorporated into the proceedings.
Q (M. Titov):
What is the fraction of H20 or other oxygen-containing
additives, that are usually added to plasmas to change the step-growth
mechanism (from diradicals to mono...) and to prevent polymerization?
A (H. Y.):
Up to 50% of H20 is added into the plasma.
